Tel.: 8615989623158
E-mail: sales@grandetop.com
Tel.: 8615989623158
E-mail: sales@grandetop.com
The complete system comprises the vacuum vessel, the vacuum pumping subsystem, the thermal subsystem and the control subsystem.
It is a key step to improve the comprehensive capability of the discharge cavity. The amount of Desorption gas in the use of relevant parts directly affects the quality of discharge capacity, so it is necessary to establish a continuous vacuum baking degassing platform. This is mainly divided into the whole cavity baking degassing platform and parts baking degassing platform. Through the establishment of the platform, in the early stage of using the discharge chamber, a reasonable baking degassing process is established to remove the residual impurity gas and minimize the influencing factors that may affect the discharge capacity of the discharge chamber. In order to meet the above conditions, In this paper, the outline of vacuum baking platform, vacuum system, control system, heating system, special interface, other properties of the whole machine are reviewed, aiming to establish a complete vacuum baking degassing platform with full use requirements.
Diagnostics System for Plasma Characterization: Capable of providing detailed analysis of plasma parameters such as density, temperature, and potential. Tools shall include, but not limited to, Langmuir probes, Faraday cups, Residual Gas Analyzers RGA200, and Electromagnetic Spectrum Analyzer.
Cylindrical Technical Parameters:
| Ultra High Vacuum Degassing Chamber | ||||||
| Horizontal/Vertical Chamber | Horizontal | Vertical | ||||
| Model No | UHV-500 | UHV-1200 | UHV-3600 | UHV-10000 | UHV-100CBM | UHV-300CBM |
| Working Diameter(mm) | 500 | 1200 | 1500 | 2000 | 2500~17000 | 3000~17000 |
| Working Length(mm) | 1000 | 1500 | 2000 | 3000 | 5000~32000 | 6000~32000 |
| No-load Vacuum Limit /Pa | 1×10﹣5Pa | 1×10﹣5Pa | ||||
| Vacuum Limit(Option) | 3kPa,1kPa,10Pa，133Pa，0.000001Pa，-0.1MPa，0.001mmHg，0.05Torr，1*10-5Pa，1*10-6Pa，1*10-7Pa,1*10-9Torr,1*10-9mbar | |||||
| Temperature Range /℃ | -190℃~3000℃ | |||||
| Temperature Range(Option) | -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃，-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃ | |||||
| Refrigerating Method | Liquid refrigerant,Refrigerating machine,Nitrogen gas temperature,Bath oil temperature, Imported compressor,Tecumseh compressor(or Bitzer Compressor),finned type evaporator,air(Water)-cooling condenser | |||||
| Heating Method | SUS#304/SUS316L Stainless Steel High-speed Heater, Infrared heating array, Infrared heating cage, IR Heater | |||||
| Irradiance | 100W/m2~2200W/m2 | |||||
| Irradiation way | solar simulator,Ultraviolet irradiation simulator,Lighting environment simulation system | |||||
| power conditions | AC 3Ψ 220V;3Ψ380V; 3Ψ480V＋N＋G, 60/50Hz | |||||
| Customized Service | Welcome to custom size, Non-standard, Specail requirements, OEM/ODM orders. | |||||
| The technical information will be subjected to change without notice | ||||||
Box Type Technical Parameters:
| Model No | UHV-072 | UHV-270 | UHV-480 | UHV-600 | UHV-720 | UHV-1000 | |
| Volume(L) | 72 | 270 | 480 | 600 | 720 | 1000 | |
| Inner chamber size(mm)W*H*D | 450*400*400 | 600*900*500 | 800*1000*600 | 1000*1000*600 | 1200*1000*600 | 1200*1000*600 | |
| Exterior chamber size(mm)W*H*D | 900*1050*550 | 1100*1600*650 | 1200*1700*840 | 1400*1750*840 | 1750*1750*840 | 1750*1750*840 | |
| Temperature range | RT+10℃~+200℃,300℃,350℃,500℃,600℃,700℃,800℃,900℃,1000℃,1200℃,1400℃,1600℃,1800℃,2000℃,2500℃,3000℃,Customization is available | ||||||
| Vacuum Limit | Vacuum Limit: 200kPa/101kPa～3kPa, 1kPa, 10Pa，133Pa，0.000001Pa，-0.1MPa，0.001mmHg，0.05Torr，1*10-5Pa，1*10-6Pa，1*10-7Pa, 1*10-9Torr, 1*10-9mbar | ||||||
| Final Vacuum | 1,No loading,≧1*10-5Pa2,Loading,≧1*10-4Pa. | ||||||
| Performance | Temp fluctuation | ±0.5℃ | |||||
| Temperature Uniformity | Atmospheric pressure:±2℃.3Kpa Vacuum state:±50℃.(Options:±5℃,±10℃,±15℃,±30℃) | ||||||
| Temperature resolution | 0.1℃/1℃ | ||||||
| Heating up time | 100℃/30min | ||||||
| Material | Exterior chamber material | Stainless steel plate+ Power Coated | |||||
| Inner chamber material | Stainless steel 12X18H10T, AISI 304, AISI 316, AISI 321 or equivalentSUS#304 Stainless Steel Heater, Molybdenum / Isostatic Graphite, Infrared heating array, Infrared heating cage. 700℃ and above The Interior Chamber is 310S Stainless Steel for Vacuum Chamber, Molybdenum Heater, Molybdenum Insulation Chamber. | ||||||
| Insulation Material | PU& Fiberglass wool | ||||||
| Feedthroughs & Flanges(Options) | Custom-made feedthoughs and Options are acceptable.Drawing and Pictures for reference only. | ||||||
| System | Circulation System | 1.UHV Magnetic Motor & Fans(Options)2.Multi-wing centrifugal circulating fan,strengthen axis and hot cold resistance rotary vane make of aluminum alloy,in order to forced convection.4.FLOW THROW Air Supply Method,level diffuse vertical heat exchange arc circulation.4.Program automatic control high speed air cylinder drive high low temperature air supply valve conversion. | |||||
| Heating system | SUS#304 stainless steel high-speed heater | ||||||
| Nitrogen system | Equipped with Nitrogen flow meter and differential pressure gauge. | ||||||
| Gas Analyzer(Option) | Technical parameters:Measurement principle: double zirconiaDisplay mode :320x240 dot matrix color LCDMeasuring range :0-10/100/1000PPm/1.00%/25.00%02Measurement accuracy :0-1000PPm/1.00%/25.00%<+1%FS0-100PPm<+2%FS0-10PPm≤+5%FSResolution :0.1PPm(trace)0.01%(constant)Repeatability :≤+1.0%FSResponse time :Tg0≤30SOutput interface : 4-20mA. DC(non-isolated output, load resistance <1KΩ)0-10V. DC(non-high output, load resistance >10KΩ)2 programmable dry contact type passive alarm output, maximum contact capacityAC220V/2A1 channel fault alarm outputCommunication mode: RS232(Default) or RS485Power supply: AC88-264V50/60Hz, power consumption <25VAAmbient temperature: -10℃~+50℃Storage humidity: <90%BH, non-condensingWorking environment humidity: <100%RH, non-condensingSample temperature: 0℃~60℃Sampling mode: through typeSample gas flow rate: 400-600mL/minIntake pressure: 5kPa≤ relative pressure ≤200kPa(>200kPa recommended optional pressure reducing valve)Exhaust pressure: Free to empty (under safe conditions)Background gas: N2 or other inert gasSize: 145mmx175mmx301mm(HxWxD)Opening size: 135mmx135mm(HxW)Sensor life: >5 years (under normal operating conditions)Gas connection: NPT1/8 internal threadReceiving weight: Net weight 3.1KgInstallation mode: embedded Instrument features:a. Friendly man-machine dialogue menu, intuitive and convenient operation.b.320x240 graphic dot matrix color LCD display, delicate and clear display.c. The imported new type of double oxidation fault sensor has the characteristics of no power and no consumption life, high measurement accuracy, fast response speed, small zero drift and so on.d. Can work in the air for a long time, will not affect the service life of the sensor lifee. Wide measuring range, can meet the PPm~% full range test.f. Automatic temperature compensation function to reduce the impact of temperature change on the measured value.g. The instrument supports multi-point piecewise linear calibration to meet the accurate measurement of oxygen content in the full range.h. Automatic storage of 40,000 pieces of historical data, users can view historical data locally at any time.i. According to user needs, RS232(default) or RS485 data communication interface can be selected for one-way or two-way communication with the host computer. Application:It is widely used in the on-line detection and analysis of oxygen content in air separation nitrogen, smelting industry, medical and health, petrochemical industry, electronic power and other industries.Ordering Instructions (please specify when ordering)Measuring rangeThe measured gas pressureBackground gas component | ||||||
| Vacuum System | GRANDE Engineering Team always configure with the Vacuum Pump as test chamber requirements of Low Pressure as below:1,Oil Sealed Vacuum Pump & Dual Stage Rotary Vane Vacuum Pump2,Roots Vacuum Pump3,Dry Vacuum Pump4,High Vacuum Pump5,Vacuum Systems-Tailored complete solutions – efficient, green and sustainable6,TURBOLAB High Vacuum Pump Systems7,Molecular Vacuum Pump8,Diffusion Pump8,Liquid Ring Vacuum Pump | ||||||
| Controller | 7Inch or 15 Inch TH5600 PID PLC ControllerPopular PID PLC controller with touch-screen operationStores 120 different profiles with up to 1200 steps each (ramp, soak, jump, auto-start, end)Step types include: ramp, soak, jump, auto-start, and endEthernet interface for remote monitoring and operationRECOMMENDED OPTIONSDry air purge, to compensate for quickly shrinking air during cooling, as well as to reduce risk of condensation.Product temperature control, allows feedback from a second sensor on the product. Ensures faster completion of transition steps.Options:Siemens or Mitsubishi PLC | ||||||
| Other Components | Cable port(50mm), control status indicator lights, loading shelves(2pcs for free) | ||||||
| Safety protection device | Over-heat protection circuit breaker,Control system overload protection,Overload indicator lamp. | ||||||
| Power Supply | AC 1Ψ 110V;AC 1Ψ 220V;3Ψ380V 60/50Hz | ||||||
| Vacuum Valves | High-end vacuum valves, The GRANDETOP Global Service team is highly experienced and utilizes well-established, proven processes. Your goals are our #1 priority. GRANDETOP Global Service assures continuous performance improvement, minimized downtimes and ensures your vacuum equipment is running at its best performance and optimal efficiencies.Actuatorsmanual with turning handlepneumatic: single acting with closing spring (NC) or opening spring (NO), or double acting | ||||||
| Air Supply | 0.6~0.8MPa(With Self-locking fast connector) | ||||||
| Customized service | Welcome to Non-standard and Specail requirements,OEM/ODM orders.Customization of inner chamber size, tempreture&humidity range,ect. | ||||||
| The technical information will be subjected to change without notice | |||||||
